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Evolution of a FIB line scan implantation profile





3D-lattice kinetic Monte Carlo simulation
  • evolution of a cylindrical Gaussian FIB implantation profile; it is demonstrated how a supersaturated system with high supersaturation gradients relaxes via
  • phase separation,
  • coarsening,
  • interface smoothing,
  • the transient formation of a nanowire,
  • the Plateau-Rayleigh instability,
  • nanowire fragmentation, and
  • Ostwald ripening towards the
  • equilibrium state.
  • evolution time extends over several orders of magnitude
  • atomic dynamics is based on the conserved-order-parameter Ising model with nearest neighbor (NN) interaction JNN
  • f.c.c. lattice (12 NNs; JNN/kTc = 0.40837)
  • here: JNN/kT = 1.5; Natoms = 112'547; FIB implantation profile FWHM = 40 a
  • color key: coordination number from pink (monomers) to purple (12 NNs)
  • time is measured in Monte Carlo steps (MCS)
  • simulation cell: (128 × 128 × 512) a3 with periodic boundaries



  • Copyright: Dr. Lars Röntzsch, Dresden, GERMANY.